The Microsystems Laboratory (MSL) is a semiconductor processing facility specializing in the fabrication of various types of radiation detectors and integrated electronics on high resistivity silicon. The facility consists of 700 sq. ft. of Class 10 clean room space with environmental control of +/-1 F and +/- 2% relative humidity. Process capabilities include high temperature oxidation, deposition of thin films, and diffusion of impurity dopants, dry plasma etching, wet chemical etching and cleaning operations, and photolithography.