Interdisciplinary Instrumentation Colloquium
"The Microsystems Laboratory – an Inside Look at Silicon Device Microfabrication at LBNL "
Speaker: Nick Palaio
Engineering Division, LBNL
Date: Wednesday, August 23, 2006
Time: 4:00 PM sharp
Place: LBNL, Building 50 Auditorium
(directions at http://InstrumentationColloquium.LBL.gov)
In the mid 1980s, coincident with the planning and initial construction of the SSC, a proposal was made to build a silicon device fabrication facility at LBNL specializing in the development of high-resistivity silicon detectors. Although the SSC was not built, the Microsystems Laboratory (MSL) survived and was constructed on the 4th floor of building 70A. For the past fifteen years, the MSL has supported scientific efforts in high-energy physics, medical imaging, and astrophysics with custom devices ranging from strip detectors and photodiodes to wafer-scale charge-coupled devices. I will describe the history and achievements of the MSL with an emphasis on the lab’s infrastructure, equipment, and process capability in a look behind the clean room walls.
Presentations (pdf files) and dates of future colloquia are posted at
http://InstrumentationColloquium.LBL.gov
Suggestions for speakers and topics are welcome. Please contact
Helmuth Spieler spieler@LBL.gov
Please direct questions regarding site access to
Cathy Thompson CAThompson@LBL.gov Tel. 510-486-5421
Dianna Jacobs DJacobs@LBL.gov Tel. 510-486-5146
